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- 000 01424nam2 2200433 4500
- 008 710513m19711972nyua b 00010 eng
- 010 __ |a 77023589 //r903
- 020 __ |a 0306671069 (v. 2 : v. 6) |c CNY1.70
- 020 __ |a 0306671034 (v. 1 : v. 3)
- 040 __ |a XAIT |a DLC |c DLC |d DLC |d ICU
- 050 00 |a TK7871.15.S558 |b M55 1971
- 099 __ |a CAL 022000377880
- 100 1_ |a Milek, John T. |q (John Theophil), |d 1915-
- 245 10 |a Silicon nitride for microelectronic applications / |c [by] John T. Milek.
- 260 __ |a New York : |b IFI/Plenum, |c 1971-72.
- 300 __ |a 2 v. (118, 117 p.) |b ill. ; |c 28 cm.
- 490 1_ |a Handbook of electronic materials ; |v v. 3, 6
- 504 __ |a Includes bibliographies.
- 505 0_ |a pt. 1. Preparation and properties -- pt. 2. Applications and devices.
- 650 _0 |a Microelectronics |x Materials.
- 650 _0 |a Silicon nitride.
- 830 _0 |a Handbook of electronic materials ; |v v. 3, etc.
- 905 __ |a XATU |d TN04/E2:6(2)
- 950 __ |a 261060 |f TN04/E2:6(2)
- 999 __ |t C |A shenxiaoyan |a 20050120 15:15:31 |M shenxiaoyan |m 20050120 15:21:58 |G shenxiaoyan |g 20050120 15:22:1