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• 000 01635nam2 2200373 4500

• 000 1000006077

• 001 0000162434

• 003 CAL

• 005 20050119085612.0

• 008 980619s1989 ohua b 101 0 eng d

• 020 __ |a 0944904319 |c CNY56.00

• 040 __ |a XAIT |c XAIT

• 090 __ |a TN405-53/E1:15:(89)

• 093 __ |a TN405-53 |2 4

• 099 __ |a CAL 021999651584

• 111 2_ |a Symposium on Materials and Processes for Microelectronic Systems |d (1989 : |c Anaheim, Calif.)

• 245 10 |a Materials and processes for micorleectronic systems / |c edited by K. M. Nair, R. Pohanka, R. C. Buchanan

• 260 __ |a Westerville, Ohio : |b the Americal Ceramic Society, Inc., |c 1989

• 300 __ |a viii, 733 p. : |b ill. ; |c 22 cm

• 440 _0 |a Ceramic transactions ; |v v. 15

• 500 __"Proceedings of the Sumposium on Materials and Processes for Micorelectronic Sustems held during the First International Ceramic Science and Technology Congress held in Anaheim, CA, on October 31-November 3. 1989" - T. p. verso.

• 504 __ |a Includes bibliographical references and index.

• 650 _0 |a Integrated circuits |x Design and construction |x Congresses.

• 650 _0 |a Ceramic materials |x Congresses.

• 650 _0 |a Micorelectronics |x Materials |x Congresses.

• 700 1_ |a Pohanka, R.

• 700 1_ |a Buchanan, R. C.

• 700 1_ |a Nair, K. M.

• 711 2_ |a Ceramic Science and Technology Congress |n (1st : |d 1989 : |c Anaheim, Calif.)

• 905 __ |a XATU |d TN405-53/E1:15:(89)

• 920 __ |a 261060 |z 1

• 950 __ |a 261060 |f TN405-53/E1:15:(89)

• 991 __022005002076

• 999 __ |t C |A zhaining |a 20050119 08:54:31 |M zhaining |m 20050119 08:56:12 |G zhaining |g 20050119 08:56:3