机读格式显示(MARC)
- 000 01593nam2a2200457 4500
- 008 840123c19839999ne qn p 0 a0eng c
- 010 __ |a 89648025 |z sn 84010739
- 016 __ |a B8464799 |2 bccb
- 035 __ |a (OCoLC)ocm10329408
- 040 __ |a WU |c WU |d NSDP |d NST |d AIP |d NST |d DLC |d NST |d DLC |d NSDP |d NST |d MCM |d DLC |d OCoLC |d GU |d NLGGC |d CLU |d OCoLC
- 050 00 |a TK7871.85 |b .M516
- 082 00 |a 621.381/52 |2 20
- 210 0_ |a Microelectron. eng.
- 222 _0 |a Microelectronic engineering
- 245 00 |a Microelectronic engineering.
- 260 __ |a Amsterdam : |b North-Holland ; |a Tokyo : |b OHMSHA, |c 1983-
- 300 __ |a v. : |b ill. ; |c 27 cm.
- 310 __ |a Four or five vols. a year, |b <2002- >
- 321 __ |a Quarterly, |b 1983-
- 362 __ |a Vol. 1, no. 1 (Sept. 1983)-
- 500 __ |a Latest issue consulted: Vol. 86, issue 2 (Feb. 2009).
- 500 __ |a Title from cover.
- 500 __ |a Published: Amsterdam : Elsevier, <2009->
- 510 2_ |a Chemical abstracts |x 0009-2258 |b 1983-
- 515 __ |a Some nos./vols. issued in combined form.
- 530 __ |a Also issued online.
- 650 _0 |a Microelectronics |v Periodicals.
- 650 _0 |a Nanoelectronics |v Periodicals.
- 650 _0 |a Semiconductors |x Design and construction |v Periodicals.
- 650 _0 |a Semiconductor industry |v Periodicals.
- 776 08 |i Online version: |t Microelectronic engineering (Online) |w (DLC) 2005233292 |w (OCoLC)39061749