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- 000 01339nam2 2200361 4500
- 008 870728s1987 paua b 101 0 eng
- 020 __ |a 0931837596 |c CNY223.01
- 050 00 |a TK7871.85 |b .R347 1987
- 082 00 |a 621.3815/2 |2 19
- 090 __ |a TG15-53/1:(87)E
- 099 __ |a CAL 022002128523
- 245 00 |a Rapid thermal processing of electronic materials : |b symposium held April 21-23, 1987, Anaheim California, U.S.A. / |c editors, Syd R. Wilson, Ronald Powell, D. Eirug Davies.
- 260 __ |a Pittsburgh, Pa. : |b Materials Research Society, |c c1987.
- 300 __ |a xvii, 485 p. : |b ill. ; |c 24 cm.
- 440 _0 |a Materials Research Society Symposia proceedings, |x 0272-9172 ; |v v. 92
- 504 __ |a Includes bibliographies and indexes.
- 650 _0 |a Semiconductor doping |x Congresses
- 650 _0 |a Rapid thermal processing |x Congresses
- 650 _0 |a Semiconductors |x Heat treatment |x Congresses
- 700 1_ |a Powell, Ronald A.
- 700 1_ |a Davies, D. Eirug
- 905 __ |a XATU |d TG15-53/1:(87)E
- 950 __ |a 261060 |f TG15-53/1:(87)
- 999 __ |t C |A shenxiaoyan |a 20040627 10:31:59 |M shenxiaoyan |m 20040627 10:34:07 |G shenxiaoyan |g 20040627 10:34:4