机读格式显示(MARC)
- 000 03236nam2 2200661 4500
- 008 820818d19831990nyubr1p 0 a0eng d
- 010 __ |a 83642371 //r85 |z sn 82003446
- 082 0_ |a 621.5/5/05 |2 19
- 098 __ |a 534B0001 |b 1749B
- 099 __ |a CAL 121999001378 |a CAL 122000654141
- 210 0_ |a J. vac. sci. technol., B Microelectron. process. phenom.
- 222 _0 |a Journal of vacuum science & technology. B, Microelectronics processing and phenomena
- 245 00 |a Journal of vacuum science & technology. |n B, |p Microelectronics processing and phenomena : |b an official journal of the American Vacuum Society.
- 246 10 |a Microelectronics processing and phenomena
- 246 10 |a Journal of vacuum science and technology. |n B, |p Microelectronics processing and phenomena
- 260 __ |a New York, N.Y. : |b Published for the Society by the American Institute of Physics, |c 1983-c1990.
- 300 __ |a 8 v. : |b ill. ; |c 29 cm.
- 310 __ |a Bimonthly, |b <, Jan./Feb. 1985->
- 321 __ |a Quarterly, |b Jan.-Mar. 1983-
- 362 0_ |a 2nd ser., v. 1, no. 1 (Jan.-Mar. 1983)-2nd ser., v. 8, no. 6 (Nov./Dec. 1990).
- 500 __ |a Title from cover.
- 510 2_ |a Chemical abstracts |x 0009-2258
- 510 2_ |a World aluminum abstracts |x 0002-6697
- 510 2_ |a Metals abstracts |x 0026-0924
- 510 1_ |a Physics abstracts. Science abstracts. Series A |x 0036-8091 |b Jan.-March 1983-
- 510 1_ |a Electrical & electronics abstracts |x 0036-8105 |b Jan.-March 1983-
- 510 1_ |a Computer & control abstracts |x 0036-8113 |b Jan.-March 1983-
- 510 2_ |a Current physics index |x 0098-9819
- 510 2_ |a Coal abstracts |x 0309-4979
- 530 __ |a Issued also on microfilm.
- 580 __ |a Includes: International Symposium on Electron, Ion, and Photon Beams. Proceedings of the ... International Symposium on Electron, Ion, and Photon Beams; and Molecular Beam Epitaxy Workshop. Proceedings of the ... Molecular Beam Epitaxy Workshop, also issued separately.
- 650 _0 |a Vacuum technology |x Periodicals.
- 710 2_ |a American Institute of Physics.
- 710 2_ |a American Vacuum Society.
- 780 01 |t Journal of vacuum science and technology |x 0022-5355 |w (DLC) 68053979 |w (OCoLC)1754855 |w s97-3171
- 785 00 |t Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena |x 1071-1023 |w (DLC)sn 92021098 |w s94-60
- 787 1_ |a Molecular Beam Epitaxy Workshop. |t Proceedings of the ... Molecular Beam Epitaxy Workshop |x 1069-3351 |w (DLC) sn 93003846 |w (OCoLC)27992608
- 787 1_ |a International Symposium on Electron, Ion, and Photon Beams. |t Proceedings of the ... International Symposium on Electron, Ion, and Photon Beams |x 1063-9586 |w (DLC) 92657341 |w (OCoLC)26149287
- 950 __ |a 261060 |f TB7/2 |s 1
- 999 __ |t C |Z dangyan |z 20041012 14:55:3