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• 000 01882nam2 2200373 4500

• 000 1000006079

• 001 0000162436

• 003 CAL

• 005 20050119090209.0

• 008 920715s1992 waua b 101 0 eng d

• 020 __ |a 081940828X |c CNY18.80

• 040 __ |a LHL |c CNY

• 090 __ |a TN407-53/E2:1673(92)

• 093 __ |a TN407-53 |2 4

• 099 __ |a CAL 022000240593 |a CAL 022000327187

• 245 00 |a Integrated circuit metrology, inspection, and process control VI : |b 9-11 March 1992, San Jose, California / |c Michael T. Postek, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering.

• 246 30 |a Integrated circuit metrology, inspection, and process control six

• 246 30 |a Integrated circuit metrology, inspection, and process control 6

• 260 __ |a Bellingham, Wash. : |b SPIE, |c c1992.

• 300 __ |a xi, 697 p. : |b ill. ; |c 28 cm.

• 490 1_ |a Proceedings / SPIE--the International Society for Optical Engineering ; |v v. 1673

• 500 __ |a "Papers presented at the Sixth Annual SPIE Conference on Integrated Circuit Metrology, Inspection, and Process Control, which took place in San Jose, California, 9-12 March 1992."--P. xi.

• 504 __ |a Includes bibliographical references and index.

• 650 _0 |a Mensuration |v Congresses.

• 650 _0 |a Integrated circuits |v Congresses.

• 700 1_ |a Postek, Michael T.

• 710 2_ |a Society of Photo-optical Instrumentation Engineers.

• 711 2_ |a SPIE Conference on Integrated Circuit Metrology, Inspection, and Process Control |n (6th : |d 1992 : |c San Jose, Calif.)

• 830 _0 |a Proceedings of SPIE--the International Society for Optical Engineering ; |v v. 1673.

• 905 __ |a XATU |d TN407-53/E2:1673(92)

• 920 __ |a 261060 |z 1

• 950 __ |a 261060 |f TN407-53/E2:1673(92)

• 991 __022005002078

• 999 __ |t C |A zhaining |a 20050119 09:00:07 |M zhaining |m 20050119 09:02:09 |G zhaining |g 20050119 09:02:2