机读格式显示(MARC)
- 000 02105nam2 2200469 4500
- 008 901119s1991 nyua rb 100 0 eng
- 020 __ |a 087942642X (lib. bdg.)
- 020 __ |a 0879426411 (softbound) |c CNY20.00
- 020 __ |a 0879426438 (microfiche)
- 037 __ |a 7160874 |b ph |c 26.00
- 050 00 |a TK153 |b .I33 1991
- 090 __ |a TM38-53/E1:(91)
- 099 __ |a CAL 022000231008 |a CAL 022000893409
- 245 00 |a IEEE micro electro mechanical systems : |b an investigation of micro structures, sensors, actuators, machines, and robots : proceedings, Nara, Japan, 30 January-2 February 1991 / |c sponsored by the IEEE Robotics and Automation Society and in cooperation with the IEE of Japan and the ASME Dynamic Systems and Control Division.
- 260 __ |a New York : |b Institute of Electrical and Electronics Engineers, |c c1991.
- 300 __ |a xiv, 288 p. : |b ill. ; |c 29 cm.
- 500 __ |a Cover title: IEEE micro electro mechanical systems, 1991.
- 500 __ |a "IEEE catalog number: 91CH2957-9"--Label on verso of t.p.
- 500 __ |a "The Fourth IEEE Workshop on Micro Electro Mechanical Systems (MEMS '91)"--P. iii.
- 504 __ |a Includes bibliographical references and indexes.
- 610 20 |a American Society of Mechanical Engineers. |b Dynamic Systems and Control Division.
- 610 20 |a Denki Gakkai (1988)
- 650 _0 |a Miniature objects |x Congresses.
- 650 _0 |a Microelectronics |x Congresses.
- 650 _0 |a Robotics |x Congresses.
- 650 _0 |a Electromechanical devices |x Congresses.
- 710 2_ |a IEEE Robotics and Automation Society.
- 711 2_ |a IEEE Workshop on Micro Electro Mechanical Systems |n (4th : |d 1991 : |c Nara-shi, Japan)
- 740 0_ |a IEEE micro electro mechanical systems, 1991.
- 905 __ |a XATU |d TM38-53/E1:(91)
- 950 __ |a 261060 |f TM38-53/E1:(91)
- 999 __ |t C |A zhouwei |a 20050125 10:10:15 |I zhouwei |i 20050125 10:11:01 |G zhouwei |g 20050125 10:11:1