机读格式显示(MARC)

• 000 01430nam2 2200361 4500

• 000 1000006078

• 001 0000162435

• 003 CAL

• 005 20050119085857.0

• 008 900313s1990 waua b 101 0 eng d

• 010 __ |a 90060891

• 020 __ |a 0819403083 |c CNY48.90

• 040 __ |a DLC |c XAIT

• 050 00 |a TK7874 |b .I5428 1990

• 082 00 |a 621.381/5 |2 20

• 090 __ |a TN407-53/E1:4(89)

• 093 __ |a TN407-53 |2 4

• 099 __ |a CAL 022000215052

• 245 00 |a Integrated circuit metrology, inspection, and process control IV : |b 5-6 March 1990, San Jose, California / |c William H. Arnold, chair/editor ; sponsored by SPIE-the International Society for Optical Engineering.

• 260 __ |a Bellingham, Wash., USA : |b SPIE, |c c1990.

• 300 __ |a viii, 528 p. : |b ill. ; |c 29 cm.

• 490 1_ |a SPIE proceedings series ; |v v. 1261

• 504 __ |a Includes bibliographical references and index.

• 650 _0 |a Integrated circuits |x Measurement |x Congresses.

• 650 _0 |a Integrated circuits |x Inspection |x Congresses.

• 700 1_ |a Arnold, William H.

• 710 2_ |a Society of Photo-optical Instrumentation Engineers.

• 830 _0 |a Proceedings of SPIE--the International Society for Optical Engineering ; |v v. 1261.

• 905 __ |a XATU |d TN407-53/E1:4(89)

• 920 __ |a 261060 |z 1

• 950 __ |a 261060 |f TN407-53/E1:4(89)

• 991 __022005002077

• 999 __ |t C |A zhaining |a 20050119 08:57:06 |M zhaining |m 20050119 08:58:57 |G zhaining |g 20050119 08:59:1