机读格式显示(MARC)

• 000 01249cam a2200349 i 4500

• 001 0000370054

• 003 CAL

• 005 20191227153100.0

• 008 190425s2018 cc a b 001 0 eng d

• 020 __ |a 9787568047876 |q hardback |c CNY88.00

• 040 __ |a SHU |b eng |c SHU |e rda |d TSU |d SCT

• 090 __ |a TN305/E1

• 093 __ |a TN305 |2 5

• 099 __ |a CAL 022019038698

• 100 1_ |a Zhang, Jie |9 (张洁), |e author.

• 245 10 |a Wafer fabrication :automation Material handling systems = |b 晶圆制造自动化物料运输系统调度 / |c Jie Zhang, Wei Qin, Lihui Wu, Junliang Wang, Youlong Lv, Xiaoxi Wang.

• 246 31 |a 晶圆制造自动化物料运输系统调度

• 264 _1 |a 武汉 : |b 武汉科技大学出版社, |c 2018.

• 300 __ |a v, 272 pages : |b illustrations ; |c 25 cm

• 336 __ |a text |2 rdacontent

• 337 __ |a unmediated |2 rdamedia

• 338 __ |a volume |2 rdacarrier

• 500 __ |a Parallel title in Chinese from copyright page.

• 504 __ |a Includes bibliographical references and index.

• 650 _0 |a Semiconductor wafers |x Design and construction.

• 700 1_ |a Qin, Wei, |9 (秦威) |e author.

• 700 1_ |a Wu, Lihui, |9 (吴立辉) |e author.

• 700 1_ |a Wang, Junliang, |e author.

• 700 1_ |a Lv, Youlong, |e author.

• 700 1_ |a Wang, Xiaoxi, |e author.

• 920 __ |a 261060 |z 1

• 998 __ |a SHU