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西文图书1.IEEE micro electro mechanical systems : an investigation of micro structures, sensors, actuators, ma TN4-53/1:(91)E
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可借复本:1 sponsored by the IEEE Robotics and Automation Society and in cooperation with the IEE of Japan and t
Institute of Electrical and Electronics Engineers, c1991.
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西文图书2.The Influence of microelectronics on measurements, instruments, and transducer design, Manchester, 3 TN4-53/12:(82)E
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可借复本:1 Institution of Electronic and Radio Engineers.
Institution of Electronic and Radio Engineers, c1982.
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