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题名/责任者:

Journal of vacuum science & technology. an official journal of the American Vacuum Society. B, Microelectronics processing and phenomena :

出版发行项:

New York, N.Y. : Published for the Society by the American Institute of Physics, 1983-c1990.

ISSN:

0734211X

ISSN:

0734-211X

载体形态项:

8 v. : ill. ; 29 cm.

起止卷期:

2nd ser., v. 1, no. 1 (Jan.-Mar. 1983)-2nd ser., v. 8, no. 6 (Nov./Dec. 1990).

变异题名:

Microelectronics processing and phenomena

变异题名:

Journal of vacuum science and technology. B, Microelectronics processing and phenomena

先前出版物:

Journal of vacuum science and technology 0022-5355

后续出版物:

Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena 1071-1023

其他相关款目:

Molecular Beam Epitaxy Workshop. Proceedings of the ... Molecular Beam Epitaxy Workshop 1069-3351

其他相关款目:

International Symposium on Electron, Ion, and Photon Beams. Proceedings of the ... International Symposium on Electron, Ion, and Photon Beams 1063-9586

附加团体名称:

American Institute of Physics.

附加团体名称:

American Vacuum Society.

论题主题:

Vacuum technology-Periodicals.

中图法分类号:

TB7

出版周期:

Bimonthly, <, Jan./Feb. 1985->

先前出版周期:

Quarterly, Jan.-Mar. 1983-

一般附注:

Title from cover.

引文/参考附注:

Chemical abstracts 0009-2258

引文/参考附注:

SPIN 1983-

引文/参考附注:

World aluminum abstracts 0002-6697

引文/参考附注:

Metals abstracts 0026-0924

引文/参考附注:

Physics abstracts. Science abstracts. Series A 0036-8091 Jan.-March 1983-

引文/参考附注:

Electrical & electronics abstracts 0036-8105 Jan.-March 1983-

引文/参考附注:

Computer & control abstracts 0036-8113 Jan.-March 1983-

引文/参考附注:

Current physics index 0098-9819

引文/参考附注:

Coal abstracts 0309-4979

载体形态附注:

Issued also on microfilm.

连接款目附注:

Includes: International Symposium on Electron, Ion, and Photon Beams. Proceedings of the ... International Symposium on Electron, Ion, and Photon Beams; and Molecular Beam Epitaxy Workshop. Proceedings of the ... Molecular Beam Epitaxy Workshop, also issued separately.

豆瓣简介：