西安工业大学图书馆书目检索系统

Online Public Access Catalogue

题名/责任者:

Silicon nitride for microelectronic applications / [by] John T. Milek.

出版发行项:

New York : IFI/Plenum, 1971-72.

ISBN:

0306671069 (v. 2 : v. 6)

ISBN:

0306671034 (v. 1 : v. 3)

载体形态项:

2 v. (118, 117 p.) ill. ; 28 cm.

丛编说明:

Handbook of electronic materials ; v. 3, 6

丛编统一题名:

Handbook of electronic materials ; v. 3, etc.

个人责任者:

Milek, John T. (John Theophil), 1915-

论题主题:

Microelectronics-Materials.

论题主题:

Silicon nitride.

中图法分类号:

TN04

书目附注:

Includes bibliographies.

内容附注:

pt. 1. Preparation and properties -- pt. 2. Applications and devices.

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