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题名/责任者:

Integrated circuit metrology, inspection, and process control IV : 5-6 March 1990, San Jose, California / William H. Arnold, chair/editor ; sponsored by SPIE-the International Society for Optical Engineering.

出版发行项:

Bellingham, Wash., USA : SPIE, c1990.

ISBN:

0819403083

载体形态项:

viii, 528 p. : ill. ; 29 cm.

丛编说明:

SPIE proceedings series ; v. 1261

丛编统一题名:

Proceedings of SPIE--the International Society for Optical Engineering ; v. 1261.

附加个人名称:

Arnold, William H.

附加团体名称:

Society of Photo-optical Instrumentation Engineers.

论题主题:

Integrated circuits-Measurement-Congresses.

论题主题:

Integrated circuits-Inspection-Congresses.

中图法分类号:

TN407-53

书目附注:

Includes bibliographical references and index.

豆瓣简介：