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题名/责任者:

Materials and processes for micorleectronic systems / edited by K. M. Nair, R. Pohanka, R. C. Buchanan

出版发行项:

Westerville, Ohio : the Americal Ceramic Society, Inc., 1989

ISBN:

0944904319

载体形态项:

viii, 733 p. : ill. ; 22 cm

丛编题名:

Ceramic transactions ; v. 15

会议名称:

Symposium on Materials and Processes for Microelectronic Systems (1989 : Anaheim, Calif.)

附加个人名称:

Pohanka, R.

附加个人名称:

Buchanan, R. C.

附加个人名称:

Nair, K. M.

附加会议名称:

Ceramic Science and Technology Congress (1st : 1989 : Anaheim, Calif.)

论题主题:

Integrated circuits-Design and construction-Congresses.

论题主题:

Ceramic materials-Congresses.

论题主题:

Micorelectronics-Materials-Congresses.

中图法分类号:

TN405-53

书目附注:

Includes bibliographical references and index.

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