MARC状态：已编 文献类型：西文图书 浏览次数：27
- 题名/责任者:
- Methods and materials in microelectronic technology / edited by Joachim Bargon.
- 出版发行项:
- New York : Plenum Press, c1984.
- ISBN:
- 0306418037
- 载体形态项:
- viii, 367 p. : ill. ; 26 cm.
- 附加非控制题名:
- Microelectronic technology.
- 会议名称:
- International Symposium on Methods and Materials in Microelectronic Technology (1982 : Bad Neuenahr-Ahrweiler, Germany)
- 附加个人名称:
- Bargon, Joachim.
- 论题主题:
- Photolithography-Congresses.
- 论题主题:
- Ion beam lithography-Congresses.
- 论题主题:
- X-ray lithography-Congresses.
- 论题主题:
- Integrated circuits-Very large scale integration-Design and construction-Congresses.
- 中图法分类号:
- TN4-53
- 一般附注:
- "Proceedings of the International Symposium on Methods and Materials in Microelectronic Technology, held September 29-October 1, 1982, in Bad Neuenahr, Federal Republic of Germany"--T.p. verso.
- 书目附注:
- Includes bibliographies and index.
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