MARC状态：审校 文献类型：西文期刊 浏览次数：61
- 题名/责任者:
- Microelectronic engineering.
- 出版发行项:
- Amsterdam : North-Holland ; Tokyo : OHMSHA, 1983-
- ISSN:
- 0167-9317
- 载体形态项:
- v. : ill. ; 27 cm.
- 起止卷期:
- Vol. 1, no. 1 (Sept. 1983)-
- 其他载体形态:
- Online version: Microelectronic engineering (Online)
- 论题主题:
- Microelectronics-Periodicals.
- 论题主题:
- Nanoelectronics-Periodicals.
- 论题主题:
- Semiconductors-Design and construction-Periodicals.
- 论题主题:
- Semiconductor industry-Periodicals.
- 中图法分类号:
- TN4
- 出版周期:
- Four or five vols. a year, <2002- >
- 先前出版周期:
- Quarterly, 1983-
- 一般附注:
- Latest issue consulted: Vol. 86, issue 2 (Feb. 2009).
- 一般附注:
- Title from cover.
- 一般附注:
- Published: Amsterdam : Elsevier, <2009->
- 引文/参考附注:
- Chemical abstracts 0009-2258 1983-
- 编号特点附注:
- Some nos./vols. issued in combined form.
- 载体形态附注:
- Also issued online.
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