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Online Public Access Catalogue

题名/责任者:

Fine line lithography / edited by Roger Newman.

出版发行项:

Amsterdam ; New York : North-Holland Pub. Co. ; New York : sole distributor for the USA and Canada, Elsevier North-Holland, 1980.

ISBN:

0444853510

载体形态项:

vii, 481 p. ; 23 cm.

丛编题名:

Materials processing, theory and practices ; v. 1

附加个人名称:

Newman, Roger.

论题主题:

Lithography.

论题主题:

Integrated circuits-Large scale integration.

中图法分类号:

TN47

书目附注:

Includes bibliographies and index.

豆瓣简介：