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Online Public Access Catalogue

题名/责任者:

Integrated circuit metrology, inspection, and process control VI : 9-11 March 1992, San Jose, California / Michael T. Postek, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering.

出版发行项:

Bellingham, Wash. : SPIE, c1992.

ISBN:

081940828X

载体形态项:

xi, 697 p. : ill. ; 28 cm.

变异题名:

Integrated circuit metrology, inspection, and process control six

变异题名:

Integrated circuit metrology, inspection, and process control 6

丛编说明:

Proceedings / SPIE--the International Society for Optical Engineering ; v. 1673

丛编统一题名:

Proceedings of SPIE--the International Society for Optical Engineering ; v. 1673.

附加个人名称:

Postek, Michael T.

附加团体名称:

Society of Photo-optical Instrumentation Engineers.

附加会议名称:

SPIE Conference on Integrated Circuit Metrology, Inspection, and Process Control (6th : 1992 : San Jose, Calif.)

论题主题:

Mensuration-Congresses.

论题主题:

Integrated circuits-Congresses.

中图法分类号:

TN407-53

一般附注:

"Papers presented at the Sixth Annual SPIE Conference on Integrated Circuit Metrology, Inspection, and Process Control, which took place in San Jose, California, 9-12 March 1992."--P. xi.

书目附注:

Includes bibliographical references and index.

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