- 题名/责任者:
- Rapid thermal processing of electronic materials : symposium held April 21-23, 1987, Anaheim California, U.S.A. / editors, Syd R. Wilson, Ronald Powell, D. Eirug Davies.
- 出版发行项:
- Pittsburgh, Pa. : Materials Research Society, c1987.
- ISBN:
- 0931837596
- 载体形态项:
- xvii, 485 p. : ill. ; 24 cm.
- 丛编题名:
- Materials Research Society Symposia proceedings, 0272-9172 ; v. 92
- 附加个人名称:
- Powell, Ronald A.
- 附加个人名称:
- Davies, D. Eirug
- 附加个人名称:
- Wilson, Syd R.
- 论题主题:
- Semiconductor doping-Congresses
- 论题主题:
- Rapid thermal processing-Congresses
- 论题主题:
- Semiconductors-Heat treatment-Congresses
- 中图法分类号:
- TG15-53
- 书目附注:
- Includes bibliographies and indexes.
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