MARC状态：已编 文献类型：西文图书 浏览次数：24
- 题名/责任者:
- Materials and processes for micorleectronic systems / edited by K. M. Nair, R. Pohanka, R. C. Buchanan
- 出版发行项:
- Westerville, Ohio : the Americal Ceramic Society, Inc., 1989
- ISBN:
- 0944904319
- 载体形态项:
- viii, 733 p. : ill. ; 22 cm
- 丛编题名:
- Ceramic transactions ; v. 15
- 会议名称:
- Symposium on Materials and Processes for Microelectronic Systems (1989 : Anaheim, Calif.)
- 附加个人名称:
- Pohanka, R.
- 附加个人名称:
- Buchanan, R. C.
- 附加个人名称:
- Nair, K. M.
- 附加会议名称:
- Ceramic Science and Technology Congress (1st : 1989 : Anaheim, Calif.)
- 论题主题:
- Integrated circuits-Design and construction-Congresses.
- 论题主题:
- Ceramic materials-Congresses.
- 论题主题:
- Micorelectronics-Materials-Congresses.
- 中图法分类号:
- TB332-53
- 书目附注:
- Includes bibliographical references and index.
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西文